曇らない覗き窓の試作
スポンサーリンク
概要
- 論文の詳細を見る
A non-condensing viewing-port window has been developed for vacuum coaters and vacuum metallurgical equipments. The window essentially consists of a transparent Teflon-FEP film heat-sealed on a square glass plate, which is heated by a thin conductive In<SUB>2</SUB>O<SUB>3</SUB> film vacuum-deposited on the back side of the glass plate. It has been demonstrated that vapors of most important metal and semiconductor elements and of many compounds do not or scarcely condense on the window when proper conditions are given.
- 日本真空協会の論文