ニッケル亜鉛フェライト膜の軟磁気特性 (フェライト<特集>)

概要

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Ni1-xZnxFe2O4 ( X=0-1.0 ) films were prepared by a reaction deposition method with an r.f. generator of 13.56 MHz. We adopted the accumulation method that a small amount of mixture of Ni, Zn and Fe metals was evaporated several times in order to uniform the compositional distribution in a film. When as-deposited films were annealed at 900°C for 6 hours in air, spinel-type ferrites were completely formed. It was suggested by measurements of lattice constants and Curie temperatures that the composition of the film annealed at 900°C were nearly equal to those of starting materials. The Ni0.4Zn0.6Fe2O4 (X=0.6) film had a saturation magnetization of 400 emu/cc and a coercive force of 30 Oe. The limit frequency of initial permeability of the films in the composition range between X= 0.2 and 0.6 was slightly higher than that of the bulk ferrites.