SMAプレートを用いた多自由度マイクロマニピュレータ

概要

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We have fabricated a micro manipulator with 1mm in diameter and 80mm in length. This manipulator has 5 degrees of freedom and uses SMA (Shape memory alloy) plates as actuators. To eliminate the assembly process and reduce the number of parts, we have developed MIF (Multi-function Integrated Film). This is a thin flexible film, which includes all electrical components; heaters, sensors, cables and electrodes, required to the SMA manipulator. As the MIF is fabricated with technology of semiconductor manufacturing, it is possible to reduce the size easily. The structure of this manipulator is very simple, because all electrical components are integrated in the MIF and the SMA plates have two functions; actuator and structural component. Therefore, complex assembly techniques are not needed. Using the strain and temperature sensors in MIF, we realized feedback control for SMA plates. As a result, this manipulator achieved 1mm in position accuracy at the tip. In addition, we have developed the device, which includes CMOS electrical circuit in MIF monolithically. For this device, electrochemical etching is applied.
社団法人電気学会の論文