メンブレン型バネ構造を持つ振動ジャイロのバネ設計に関する一考察
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概要
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Recently, micromachined vibratory gyroscopes are in the lime light. Especially, the double resonant mode is important in order to improve the sensitivity of micro gyroscopes. For such a purpose, some membrane structure of the micromachined gyroscopes have been reported. In this paper, we show the design strategy of the membrane spring for noting the resonance characteristics. In the paper, by measuring the fabricated devices and some simulations, we pointed out that the through knowledge of a nonlinearity of the membrane spring is important for micro structures.
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