高周波スパッタリング法を用いて作製した薄膜固体酸化物型燃料電池のコンパクトセルスタック特性
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概要
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Performance of a compact cell stack of thin film solid oxide fuel cell (SOFC) using yttria-stabilized zirconia (YSZ) electrolyte films between 7 μm and 9 μm thick grown by RF magnetron sputtering was studied to power generation property at intermediate temperatures from 700 to 900°C. The series connected SOFC using YSZ film of 7 to 9 μm thick showed a stable generation property at intermediated temperature of 700°C. Moreover, the V-I property of series connected SOFC using YSZ film of 9 μm thick obtained higher than that of the cell prepared with YSZ film of 7 μm thick. As the result, it was found that series connection of two cells could improve the cell performance, and a compact cell stack of thin film SOFC could be operable at intermediate temperatures.
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