大型ガラス基板へのスパッタリング装置の発展と新技術
スポンサーリンク
概要
- 論文の詳細を見る
ULVAC has maintained a leading share in the market of sputtering deposition systems for liquid crystal display (LCD) production since 1990, when LCD market started its rapid growth. These systems are used to prepare TFT-array and transparent conductive oxide (TCO) layers in LCD. This document describes the features of our sputtering system and especially focuses on the change in design concept of the system at the Gen. 7 substrate which aimed to achieve the demands for “Simple, Small-footprint and high-productivity”. A total package we propose for the sputtering deposition production, including the target material supply and the system maintenance, is also presented. Finally, recently proposed new materials for TFT are introduced: IGZO, a high mobility TCO material, and Cu alloys for low resistivity wiring.
論文 | ランダム
- 〔347〕高圧用ラビリンスについて〔K.H.Groddeck, Forschung, Ing.-wes, 1957,Bd.23,Nr.5,S.183〜195,図19〕
- 非対称容量制約付き配送路決定問題の解法(組合せ)
- The K-th best Chinese postman problem.
- 〔241〕高圧高温蒸気タービンについて-IV 〔Carl Brennecke & Rudolf Schinn, VDI-Z, 1957-9,Bd.99,Nr.27,S.1335〜1342,図28,表3〕
- VLSIにおける2層オーバーラップ型チャネル・ルーティング問題の解法(組合せ)