Opto-Thermal Analysis of Blue Multi Laser Diode Annealing (BLDA)
スポンサーリンク
概要
- 論文の詳細を見る
Opto-Thermal analysis of Semiconductor Blue-Multi-Laser-Diode Annealing (BLDA) for amorphous Si (a-Si) film is conducted by varying the irradiation power, the scanning velocity and the beam shape of blue-laser of 445nm. Thermal profiles, maximum temperature of the a-Si film and the melting duration are evaluated. By comparing the simulated results with the experimental results, the excellent controllability of BLDA for arbitrary grain size can be explained consistently by the relation between irradiation time and melting duration. The results are useful to estimate poly-crystallized phase such as micro-polycrystalline Si, polycrystalline Si and anisotropic lateral growth of single-crystal-like Si.
論文 | ランダム
- Hydrophilic diazirine polymer for one-step photo-fabrication of proteins on polypropylene surface
- 室内空気質の評価の展開((1)室内環境,3.1.1 空間から見た分野別研究,3.1 専門分野別研究,3.大気環境研究の新展開,創立50周年記念号)
- コースの定理は本当に成立するのか (1) - 法律上の責任ルールと財産権ルールの区別
- Considerations on Basis for Vortex-Lattice Method
- エラスチンに特有な配列をもつペプチド誘導体の特長とその応用について (特集 ペプチド原料の動向と化粧品分野への応用)