光硬化性ホウケイ酸塩系薄膜材料の作製と微細構造形成
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Photo-curable organoborosilicate glasses were synthesized through a catalyst- and solvent-free and non-aqueous alcohol condensation process at low temperature below 100°C. Formation of Si-O-B linkage was confirmed by IR spectra. After irradiation of UV-light, we have successfully cured the prepolymer coatings into prepared transparent and homogeneous thin film. A refractive index of the thin film of B(OH)3: 3-Methacryloxypropyltrimethoxysilane=1:1 composition was measured by a prism coupling method n=1.515 at 633 nm. Moreover, pencil hardnesses according to JIS5400 of photo-cured thin film before and after heat treatment at 550°C were 6H and over 10H, respectively. We demonstrated fabrication of microstructures on transparent thin film by embossing process followed by photo curing.