Removal of Fe3O4 Film Using Atmospheric Transferred Plasma at Low Temperature

概要

論文の詳細を見る
Ar transferred thermal plasma was applied onto Fe3O4 film covering an Fe rod using a hybrid plasma furnace composed of both non-transferred and transferred thermal plasma. A tungsten rod was used as an electrode. The flame from the transferred plasma spread over the surface of the Fe3O4 film. The transferred plasma direct current was set to each of the values (0, 2, 3, 4, and 5 A) after the non-transferred plasma made contact with the Fe3O4 film. The removal mass of the Fe3O4 film directly increased as the transferred plasma current increased. The oxygen potential of the output gas decreased when the plasma was irradiated. The temperature on the surface was 1073 (K) during the 5 A plasma irradiation (this temperature is under the melting point), even though a trace of melted Fe3O4 was observed after the plasma treatment.