Properties of N-doped Diamond-like Carbon Films Prepared by the PLD Method

概要

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N-doped diamond-like carbon (DLC) films were deposited on Si substrates by pulsed laser deposition (PLD) at varying N2 pressure. The films were characterized by Raman spectroscopy and X-ray diffraction (XRD). Spectra show that the sp2 hybridized carbon content increases with increasing N2 pressure and that the films have a mainly amorphous structure. The residual stress of the films is reduced from 31.8 to −2.2 GPa by N-doping at appropriate N2 pressure.