Development of an Active Vibration-Canceling System Using Inertial Force Generators

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概要

• 論文の詳細を見る

• The density of components on precision devices such as semiconductor processors has been increasing recently. As a consequence, the acceptable vibration level of floors on which manufacturing equipment is installed is decreasing. Conversely, vibrations generated by the manufacturing equipment are increasing because manufactured objects are increasing in size. For these situations, active vibration isolation devices are usually used to isolate equipment from floor vibrations. However, the vibration control forces generated by active vibration isolation devices cause floor vibrations when these devices are used to isolate the large vibrations generated by manufacturing equipment. To solve this problem, a new vibration-canceling system using inertial-force generators is developed in this research. In addition, the effectiveness of the developed vibration-canceling system is confirmed via experiments.

• 一般社団法人 日本機械学会の論文

著者

• Yasuda Masashi

  TOKKYOKIKI Co.

• YAMASHITA Tomoyuki

  Dept. of Mechanical System Engineering, Tokyo University of Agriculture and Technology

• TAGAMI Masaharu

  Dept. of Mechanical System Engineering, Tokyo University of Agriculture and Technology

• TAGAWA Yasutaka

  Dept. of Mechanical System Engineering, Tokyo University of Agriculture and Technology

• HORA Hirokazu

  Tokkyokiki Corporation

• ENDO Kenichi

  Tokkyokiki Corporation

• NOGUCHI Yasuyuki

  Tokkyokiki Corporation

関連論文

• Development of active mass damper to isolate vibration from rotating machine
• Development of a Microvibration Testing Device : Realizing Microvibrational Reference Waves Smaller than Floor Vibrations
• Development of Antiresonance Enforced Active Vibration Absorber System
• Development of an Active Vibration-Canceling System Using Inertial Force Generators

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