Monolithic reconfigurable bandpass filter using single-pole double-throw RF MEMS switches

概要

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This paper demonstrates a micromachined two-state switchable bandpass filter operating at 2.4 and 5.2GHz. The proposed filter is monolithically composed of two single-crystal silicon (SCS) single-pole double-throw (SPDT) RF MEMS switches and two kinds of two-pole LC-resonators, and it is fabricated by a robust silicon on glass (SiOG) process that combines various micromachining technologies. The insertion losses for each output port of the fabricated SPDT switch was less than 0.15dB up to 5GHz. The input to output isolations were higher than 31dB for each port. The measured center frequencies of the fabricated reconfigurable filter were 2.9 and 5.4GHz, and the measured passband losses were 2.43 and 5.51dB in the low and high frequency bands, respectively.