Effects of Material Properties on Ductile Mode Machining in Ultra-precision Grinding of Lithium Niobate

概要

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With improvements in many precise instruments, the necessity of high quality surfaces for optical devices and memory devices has become a major concern. In recent years, lithium niobate （LiNbO3） has been used with excellent optical and electrical characteristics in a wide range of optical fields. In addition, lithium niobate has been studied as a potential material for holographic data storage. In order to obtain the necessary high quality surfaces, new methods for finish machining of brittle materials, ductile mode machining, need to be considered. In this study, lithium niobate with （0001） plane was used to observe the propagation of surface cracks under a number of experimental conditions. In the microhardness test, the crystallographic dependence was obtained; direction <1210> had an especially large number of surface cracks. However, in the grinding test, crack-free surfaces were observed.
広島国際学院大学の論文