レーザ蛍光法によるスパッタリング過程の研究 I : 鉄原子スパッタリングの放出角度分布
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概要
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Sputtering by bombarding neutrals on the first wall of a controlled fusion reactor is believed to be the dominant among various processes of plasma-surface interactions, as an impurity-release to plasmas at one hand and as the reduction of the wall thickness at the other. In order to obtain basic insight into the process, laser fluorescence spectroscopy was applied to study temporal developments of angular distributions of sputtered atoms. The results supported the usefulness of the technique and were explained by oxidizations of the surface and/or formations of sputtering cones, the latter being confirmed by using a scanning electron microscopy. Future improvements of experiments were also described.
- 九州大学大学院総合理工学研究科の論文
- 1983-12-01
九州大学大学院総合理工学研究科 | 論文
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