スパイラルアンテナを用いた誘導結合型プラズマ生成における電子の熱運動効果
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概要
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The effect of the electron thermal motion on inductively coupled plasma (ICP) production by the use of a planar, spiral antenna was investigated experimentally. Results were compared to the calculated ones by the non-local model based on the electron motion. Both of the measured skin depth of the evanescent wave and antenna-plasma loading resistance suggested a collisionless (collisional) heating mechanism in the low (high) collisionality for the ICP production. In addition, changing the boundary condition, Ar filling pressure and radio frequency (RF),the measured wave amplitude and the phase showed that the electron thermal motion plays more important role under the low collisionality.
- 九州大学大学院総合理工学研究科の論文
- 1999-03-01
九州大学大学院総合理工学研究科 | 論文
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