C3H8-Ar混合ガス中でスパッタしたa-SixC1-x:H薄膜
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概要
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Hydrogenated amorphous silicon-carbon alloy films have been prepared by reactive sputtering of a silicon target in a gaseous mixture of C\_3_H\_8_ and Ar. Optical gap energies determined from absorption spectra in the visible region show systematic variation corresponding to carbon content estimated from intensity of the infrared absorption of Si-C bond. The optical gap has a maximum of 2. 32 eV at composition near Si\_0.2_ C\_0.8_.White-yellow photoluminescence has been observed at and below room temperatures for carbon-rich films. The luminescence exhibits a broad spectral distribution (half width with \sim\0.85 eV) having a peak energy around 2.0 eV. The emission increases linearly with excitation over a wide range of excitation densities from 10\^-1^W/cm\^2^ to 10\^5^W/cm\^2^. Brief discussion is given for the origin of this emission.
- 長岡技術科学大学の論文
- 1982-02-27