Surface irradiation and materials processing using polyatomic cluster ion beams
スポンサーリンク
概要
- 論文の詳細を見る
We developed a polyatomic cluster ion beam system for materials processing, and polyatomic clusters of materials such as alcohol and water were produced by an adiabatic expansion phenomenon. In this article, cluster formation is discussed using thermodynamics and fluid dynamics. To investigate the interactions of polyatomic cluster ions with solid surfaces, various kinds of substrates such as Si(100), SiO2, mica, polymethyl methacrylate, and metals were irradiated by ethanol, methanol, and water cluster ion beams. To be specific, chemical reactions between radicals of polyatomic molecules and surface Si atoms were investigated, and low-irradiation damage as well as high-rate sputtering was carried out on the Si(100) surfaces. Furthermore, materials processing methods including high-rate sputtering, surface modification, and micropatterning were demonstrated with ethanol and water cluster ion beams.
論文 | ランダム
- 踏み台昇降運動による女子・年令別変化について : 3年追跡調査 : 8.測定評価に関する研究
- 4. 踏み台昇降運動による女子年令別変化について : 重量変化
- 加令の運動生理学的研究-2-踏み台昇降運動による女子・年令別変化について
- 406. 踏み台昇降運動による女子・年令別変化について
- 「踏み台昇降運動」の高さの変化によるエネルギー代謝(IV)