Enhanced Capacitance of Composite Anodic ZrO2Films Comprising High Permittivity Oxide Nanocrystals and Highly Resistive Amorphous Oxide Matrix

概要

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Anodic oxide films with nanocrystalline tetragonal ZrO2 precipitated in an amorphous oxide matrix were formed on Zr Si and Zr Al alloys and had significantlyenhanced capacitance in comparison with those formed on zirconium metal. The capacitance enhancement was associated with the formation of a high-temperaturestable tetragonal ZrO2 phase with high relative permittivity as well as increased ionic resistivity, which reduces the thickness of anodic oxide films at a certain formation voltage. However, there is a general empirical trend that single-phase materials with higher permittivity have lower ionic resistivity. This study presents a novel material design based on a nanocrystalline amorphous composite anodic oxide film for capacitor applications.
2011-07-27