Surface Treatment of Polymer Film by Atmospheric Pulsed Microplasma: Study on Gas Humidity Effect for Improving the Hydrophilic Property

概要

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Surface treatment of a poly(ethylene naphthalate) (PEN) film by atmospheric pulsed microplasma with humid Ar gas was experimentally investigated. A Marx generator with metal--oxide--semiconductor field-effect transistor (MOSFET) switches that generates negative pulses was used for generating microplasma. Hydrophilization was estimated by measuring contact angle before and after the microplasma surface treatment by a remote process. The initial contact angle was about 76°. The minimum contact angle of about 20° was obtained after a treatment, a discharge voltage of $-1.3$ kV negative pulse, a frequency of 24 kHz, a gas relative humidity of about 60%. Analysis by X-ray photoelectron spectroscopy (XPS) showed a decrease in the C 1s peak corresponding to the C--H bond or C--C bond, and increases in the O 1s peaks corresponding to the C=O bond or O--H bond.
2011-08-22