低気圧誘導結合型高周波放電プラズマのプラズマ制御パラメーターとプラズマパラメーターに関する研究（その２）
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概要
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When applying plasma, many different plasma conditions such as the case where a low electron temperature is required, the case which is uniform in the wide area of the plasma electron density are required. To create plasma, the plasma control parameter of sample gas pressure p, ionization voltage Vs and the ionization electric power Pa is important. Also, to investigate basic plasma parameter of the electron temperature Te of the created plasma and electron densities Ne is required. In this paper, changing sample gas into Ne gas from He gas and examining relation between the plasma control parameter and plasma parameter experimentally are reported.
- 2011-09-20
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