Propagation loss of amorphous silicon optical waveguides at the 0.8 ﾎｼm-wavelength range
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We fabricated optical waveguides using amorphous silicon deposited by catalytic chemical vapor deposition method. The waveguides were fabricated by photolithography and wet chemical etching. The propagation loss of 15 dB/cm at 830 nm was measured. ©2010 IEEE.
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