Mechanism of particle transport in magnetized silane plasmas

概要

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Particle transport phenomena were investigated in silane plasmas in the presence of a magnetic field B perpendicular to a discharge electric field E. From the experimental results, it was concluded that silicon particles were transported in the opposite direction to the E × B drift, and the particle density decreased with increasing applied magnetic flux density. Theoretical calculations on particle drift show that negatively charged particles can be transported in the opposite direction to E × B drift and the drift velocity increases with B for the present experimental conditions. Both experimental and theoretical results suggest that transport by modified ambipolar E × B drift can eliminate particles from discharge space.
Institute of Physics Publishingの論文
1996-05-00