INFRARED SPECTRA AND THERMAL DESORPTION SPECTRA OF ISOTOPICALLY MIXED AMORPHOUS HYDROGENATED CARBON FILMS PREPARED FROM MIXTURE OF CD4 AND H2 OR CH4 AND D2

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Isotopically mixed amorphous hydrogenated carbon films were prepared from 1:1 mixture of CH4 and D2 (a-CH:D). The atomoc ratio of H:D incorporated in the films were 0.83:0.17 for soft films and 0.80:0.20 for hard films. Compared the infrared spectra of these films with another spectra of the films prepared from 1:1 mixture of CD4 and H2 (a-CD:H), it was concluded that deuterium originating from D2 in the plasma is considerede to be incorporated as an isolated aliphatic C-D bonds exclusively. Thermal desorption spectroscopy of hard a-CH:D films suports this idea because the films release H2 and HD butvery low D2 by heat-treatment under vacuum.