可変キャパシタンスンスを利用した静電浮上機構のセルフセンシング制御システム

概要

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Self-sensing electrostatic suspension is achieved with a control system using a variable capacitor. In the control system, a variable capacitor is connected with an electrostatic actuator and a constant power supply. The voltage applied to the actuator is adjusted by the variable capacitor. The position of the floator can be estimatedfrom the capacitance of the variable capacitor and the voltage applied to the electrostatic actuator. The estimated signal was fed back and used for suspension. Finally, self-sensing electrostatic suspension was achieved.