Cooperation of Production, Product Handling and TransferScheduling for Semiconductor Fabrication

概要

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Various kind of productions are made in semiconductor fabrications, where it employs the production system with multiprocesses and multiple Automated Guided Vehicles(AGVs)for transportation. It is difficult to optimize planning of production and transportation simultaneouslybecause of the complicated flow of semifinished products. This paper describes the formulations of production scheduling, transportation routing and sequence planning ofmaterial handling system, and algorithm for simultaneous optimization of plannings by using solution space reduction and simulated annealing method. In this paper, all production system is decomposed to the production scheduling problem, transportation routing problemby AGVs and sequence planning of material handling system with managing stockers and buffers. Production scheduling problem and transportation routing problem are solvedby the optimization algorithm using the decomposition routing problem. Sequence planning of material handling robot problem is solved by the algorithm using simulated annealing method.
Faculty of Engineering, Okayama Universityの論文
2008-01-00