干渉縞走査型焦点誤差検出法
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概要
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A focus sensing method using far-field diffraction was studied by simulation and experiment. Simulation results gave well-shaped focus error signals as well as independent ones of the photo-detector position as long as the photo-detector is located within the interference area of 0th and ±1st orders. Also the capture range and the influence of the incident-beam aberration were investigated. Following experiments presented well-shaped bipolar signals around the focus from the two-element photo-detector without micro adjustment.
- 2010-06-30
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