Ion-Beam Engineering and Its Application to Micro Machine Processing
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概要
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This summary introduces new technology of mechanical engineering using ion beam technique. Ion-beam process is induced from plasma state. Engineering working may not proceed satisfied in equilibrium state but in non-equilibrium as the technology becomes precise and high level. Vacuum deposition, ion plating, sputtering and ion implantation are classified with their energy. Preliminary application of ion implantation to micromachine processing is reviewed. Aluminum plate was maked, irradiated by nitrogen ion (with 40keV, 10μA/cm2 and 0.1C/cm2), etched with 0.1N NaOH. Trench structure of 15μm in depth and a high aspect ratio of 0.9 was achived.
- Faculty of Engineering, Mie Universityの論文
- 1993-12-21
Faculty of Engineering, Mie University | 論文
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