多元電子ビーム蒸着法を用いたクロム酸鉛結晶薄膜の成長と感湿特性

概要

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Bulk or film Lead Chromates have been manufactured by several methods, and reported as humidity-sensing material. Multi-source electron beams evaporation method has good ability to control film composition because multi sources can be controlled independently. But Lead Chromates had not been manufactured by this method. Therefore this method was applied to the growth of Lead Chromate film with the sources of Lead,Chromium and Oxygen gases. Evaporated atoms or molecules were activated by using RF plasma in order to crystallize the film. As the result,the growth condition, under which Pb2CrO5 and the mixture of PbCrO4 and Pb2CrO5 films were crystallized,was found. The films were tighter and smoother than Lead Chromates manufactured by the other methods. The humidity-sensing characteristics of the films indicated narrow hysteresis loop and small change of standing.
関東学院大学工学総合研究所の論文