InNの中遠赤外反射スペクトル

概要

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To investigate both optical and electrical properties of InN, we have performed middle-infrared reflectance spectra of InN thin films and the fitting calculations by using theoretical formula of dielectric functions which include the interaction between phonons and plasmons in previous work. In this work, we have been measuring not only middle-infrared but also far-infrared reflectance spectra. The errors between middle ~ far infrared reflectance spectra and calculated ones are much smaller than those in previous work. Based on these results, we present the possibility of the electrical properties investigation by using these infrared reflectance measurements, and discuss the electric characterizations of three different InN thin films.