The Resistive and Structural Properties of Evaporated Chromium and Chromium−Copper Alloy Thin Films*
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概要
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The resistive and structural properties of chromium and chromium-copper alloy films were found to vary significantly with changes in substrate temperature and deposition rate, and with heat treatment. Properties such as resistance, temperature coefficient of resistance, and Hall coefficient differ considerably from the corrected bulk values. From an investigation of the structural properties of films, it was found that the lattice constants of the as-deposited chromium and copper films were somewhat smaller than the ASTM value. Heat treatment in air at 200℃ for 3 hrs has improved the resistive properties as determined on 500 Å thick films containing a copper content lower than 60 wt. ％.
- 北見工業大学の論文
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