J161033 垂直可動型静電-弾性協働マイクロアクチュエータの構造および製作プロセスの検討([J16103]マイクロナノメカト口ニクス(3))

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概要

• 論文の詳細を見る

• The microactuator that makes electrostatic energy/force collaborate with the elastic energy/force was previously proposed. It had the non-linear leaf spring that was designed to work effectively, and the vertical electrodes that moved horizontally (in parallel to the substrate). We propose the new type of microactuator that has the horizontal electrodes moving vertically to generate more powerful electrostatic energy/force. It is necessary to design vertically movable non-linear micro leaf spring in order to make the microactuator highly effective, and it is also needed to develop the fabrication process which uses gray tone lithography to form the non-linear leaf spring. In this paper, the vertically movable non-linear leaf spring was designed and its characteristic was evaluated by using the FEM analysis. The fabrication process of the vertically movable non-linear spring was developed, and its validity was evaluated, too.

• 2011-09-11

著者

• 津山 奏

  山口大学大学院理工学研究科

• 南 和幸

  山口大学

• 益本 寛之

  山口大学大学院医学系研究科

• 中島 雄太

  山口大学

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• J161033 垂直可動型静電-弾性協働マイクロアクチュエータの構造および製作プロセスの検討([J16103]マイクロナノメカト口ニクス(3))

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