OS1606 応力負荷されたLN結晶のSEM観察(OS16-1 ナノ・マイクロ材料,薄膜の変形と強度,OS-16 ナノ・マイクロの視点からの変形と破壊の力学)

概要

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LiNbO_3 is one of the typical piezo-electric materials that has been widely used in various transducers, sensors and actuators. In this material, internal strain can bring about a surface electric charge and an inside electric field. Although an internal strain and electric phenomena in piezo-electric materials are key issues, in-situ observation of stressed piezo-electric materials has been rarely performed. In the present work, the effect of internal strain on electric phenomena in piezo-electric ceramics was investigated in-situ using field emission scanning electron microscopy (FE-SEM). Single crystal plates of LiNbO_3 grown by the Czochralski method have been used for the present experimental. Vickers hardness tests and FE-SEM observation after the tests have been conducted for the samples with and without a bending stress. It is found that the electron beam related to the formation of SEM image was influenced by the bending stress of the samples. It was considered that a localized internal strain in a piezo-electric material could generate intense electric field and therefore strongly interact with the electron beam related to the formation of SEM image. This phenomenon may cause problems when a small and nano-scale structure based on piezo-electric materials is stressed in an electric system.
一般社団法人日本機械学会の論文
2011-07-16