202 半導体製造におけるスケジューリングの最適化および実規模モデルへの適用(OS2-1 半導体生産システムのスケジューリング)

概要

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Semiconductor manufacturing process flow is consisted of hundreds of process steps using hundreds of machines repeatedly, which is called a re-entrant flow shop, and it is very difficult to optimize the production schedule. Furthermore, in recent years, it has been becoming more difficult to use machines effectively because the product-mix becomes much more complex and the production lot size becomes much smaller. Therefore, it is indispensable to integrate a variety of scheduling methods into a solution to achieve the high production efficiency. In our previous researches we applied the well-known cooperative scheduling method, Lagrangian Decomposition and Coordination method, into an abstracted model based on the actual production line. Then we have verified the proposed method can create schedule effectively. In this paper we verify the effectiveness of the proposed method application into larger models too and make issues clear in order to apply it into the actual scale model.
一般社団法人日本機械学会の論文
2011-03-16