Evaluation of Electrical Property at SrTiO_3 Bicrystal Interface by EBIC

概要

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We applied electron beam induced current (EBIC) imaging to investigate the spatial variation of energy band structure in a SrTiO3 (001) bicrystal with the (100) 10° tilt boundary before and after annealing at 973 K under a vacuum of 〜10^<-7> Torr and after the following forming process with an electrical dielectric breakdown. The EBIC observation was carried out in the temperate range between 200 and 300 K. Although the EBIC contrast of the tilt boundary was invisible before and after the annealing, that becomes visible after the forming process and stronger as the observation temperature decreases to less than 260 K. It was found that the EBIC current direction at the tilt boundary is opposite to that in the matrix, i.e. single crystalline regions of both sides of the tilt boundary. The EBIC current in the matrix increased after the annealing and decreases again after the forming process, implying the generation and the redistribution of oxygen vacancies occurred in the bicrystalline SrTiO_3. We propose energy band structures of the bicrystalline SrTiO_3 after the annealing and after the following forming process.
2011-06-27