フェムト秒領域のパルスレーザーによる材料加工技術の開発

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Materials processing using the short pulse lasers are very attractive, because of non-contact processing that realizes accurate processing avoiding the effects of the excessive energy of laser pulse. The use of fs-lasers is effective to avoid the thermal effect induced by the excessive energy, however, there are only few cases that the effects of the pulse duration on the processing properties is treated quantitatively in fs-region pulse, although many reports have been presented for the rough comparison between fs and ns pulse durations. So we have investigated the relation between the processing characteristic and pulse duration in fs-region on the drilling process. We performed two kinds of experiments in order to find out the pulse duration dependence of processing characteristic for the processing with lasers in fs-region. First, we have investigated the relation between the degree of thermal effect and the pulse duration on the drilling process of metals by using the developed system in order to find out the optimized condition for the processing with lasers in fs-region. We found that the dimension of thermal-affected region formed around the drilled hole became smaller when the melting points of the samples were lower and the pulse durations were shorter. Through these experiments, we could estimate the pulse duration short enough for the process in which the thermal-affected region was eliminated for each samples. Second, we have investigated pulse duration dependency of processing threshold for the processing technology with lasers in fs-region. As a result, we found the ablation threshold for each sample is determined by fluence. These research results will become a big step on the development of processing technology with the pulse laser in fs-region.
2010-09-30

フェムト秒領域のパルスレーザーによる材料加工技術の開発

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