M4-6 マイクロ電極を用いた電界駆動型マイクロポンプ(M4 ポンプ,液滴・気泡駆動)

概要

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An experimental investigation was conducted to develop an electrohydrodynamic (EHD) pump based on a microelectromechanical system (MEMS) technology. To develop an EHD micropump with enhanced pumping performance, including not only long-term driving but high-pressure generation, two electrode plates were prepared. On one, the electrode pattern was designed as a series of planar comb fingers. The electrode had a width of 120μm, with a 60μm gap between each pair. The gap between the electrode pairs is 480μm. The other electrode plate was a non-patterned plane surface. The working fluid was confined between the two electrodes, which faced each other with a distance of 100μm. The pump generated a maximum pressure of 1000Pa and a maximum flow rate of 6 mL/min. The highest power consumption and pump performance were 30mW and 0.25%.
2009-10-15