A26 Mechanism of Material Removal in Nanomachining using AFM Diamond Tip(M4 processes and micro-manufacturing for science)

概要

論文の詳細を見る
Nanoscale machining experimets on the fused quartz surface has been performed using an atomic force microscope combined with a two-axis capacitive force/displacement transducer. The minimum normal force f_<nP> when a reproducible groove begins to be formed with an increase in normal force f_n is about 4.7 μN. The minimum critical normal force f_<nR>, tangential force f_<tR> and groove depth d_<gR> when the material removal process begins with an increase in normal force are 33.7 μN, 18.7 μN and 4.3 nm, respectively. The feature change in swelling ratio R_s and the ratio of force components f_l/f_n at the critical normal force f_<nR> can be used to detect a critical condition when the material deformation behavior changes from the plastic deformation to the removal process.
一般社団法人日本機械学会の論文
2009-12-01