S1103-3-4 MVP法によって細穴内面に成膜されたDLC膜の摩擦特性(第15回卒業研究コンテスト(3))

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概要

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• We have developed a new high-density plasma generation method, or Microwave-sheath Voltage combination Plasma (MVP), by microwaves propagated as surface waves that were guided by the interface between high-density plasma and underdense region in ion sheath surrounding metal surface. By using the newly developed PECVD equipment employing MVP method, DLC coating was deposited on the inner surface of a stainless-steel pipe (4.4 mm in inner diameter, 50 mm in length, SUS304). We conducted rotational friction test of the coating against a cast iron shaft ; the lowest friction coefficient was 0.17. Additionally, we conducted another rotational friction test of the DLC coating on inner surface of a stainless-steel pipe against the DLC coating on cast iron shaft. As a result, friction coefficient between DLC-coated pipe and shaft was reduced 14 % compared to that between DLC-coated pipe and non-coated shaft.

• 2009-09-12

著者

• 森 一憲

  名大

関連論文

• S1103-3-4 MVP法によって細穴内面に成膜されたDLC膜の摩擦特性(第15回卒業研究コンテスト(3))

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