C33 3次元座標プローブの開発 : 第1報: 歪みゲージを用いた場合についての検討結果(OS-5 加工計測・評価)

概要

論文の詳細を見る
To improve the commodity performance as the micro processing technology in recent years develops, 3D-Coordinate-Mesuring Machine of high accuracy is needed. There are a method of detecting the transformation in the blade spring that supports the probe by combining the laser and PSD etc. as a detector of the high accuracy used now. However, needs of the measurement with high accuracy rise, too and the development of a new technique is demanded. In this research, for the primary stage, using strain-gage is examined for the accuracy improvement of the touch-Probe.
一般社団法人日本機械学会の論文
2008-11-21