21417 MEMS技術によるミリメートルサイズエアタービンの作製(MEMS,OS.1 機械工学が支援する微細加工技術(半導体・MEMS・NEMS),学術講演)

概要

論文の詳細を見る
A micro air turbine was fabricated with MEMS technology. The turbine was composed of five silicon layers including a rotor and a glass cover plate. The diameter of the rotor was 1.6mm and the total turbine size was 4mm x 4mm x 2.3mm. The rotor and the stator blade patterns and groove passages were formed by photolithography process. A penetration hole was formed on the glass plate for a gas outlet. The anodic bonding method was applied for joining the Si surface and the glass interface. Compressed air was injected into the fabricated turbine, and the maximum rotational speed 6970rpm of the rotor was observed when the flow rate was 4.1L/min. The starting torque was calculated by the computer simulation. The output power was estimated to 0.1 mW by the measurement result of rotational speed and the calculated starting torque.
2008-03-13