Capacitance Extraction of Three-Dimensional Interconnects Using Element-by-Element Finite Element Method (EBE-FEM) and Preconditioned Conjugate Gradient (PCG) Technique(Integrated Electronics)

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概要

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• The element-by-element finite element method (EBE-FEM) combined with the preconditioned conjugate gradient (PCG) technique is employed in this paper to calculate the coupling capacitances of multi-level high-density three-dimensional interconnects (3DIs). All capacitive coupling 3DIs can be captured, with the effects of all geometric and physical parameters taken into account. It is numerically demonstrated that with this hybrid method in the extraction of capacitances, an effective and accurate convergent solution to the Laplace equation can be obtained, with less memory and CPU time required, as compared to the results obtained by using the commercial FEM software of either MAXWELL 3D or ANSYS.

• 社団法人電子情報通信学会の論文
• 2007-01-01

著者

• Yin Wen-yan

  School Of Electronic Information And Electrical Engineering Shanghai Jiao Tong University

• Xu Jianfeng

  School Of Electronic Information And Electrical Engineering Shanghai Jiao Tong University

• LI Le-Wei

  Department of Electrical and Computer Engineering, National University of Singapore

• LI Hong

  School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University

• MAO Junfa

  School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University

• Li Le-wei

  Department Of Electrical And Computer Engineering The National University Of Singapore

• Li Le-wei

  Department Of Electrical And Computer Engineering National University Of Singapore

• Mao Junfa

  School Of Electronic Information And Electrical Engineering Shanghai Jiao Tong University

• Li Hong

  School Of Electronic Information And Electrical Engineering Shanghai Jiao Tong University

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