センサ・ネットワーク用弾性表面波希薄ガス・センサの研究(第2報)

概要

論文の詳細を見る
A new concept called "Sensor Network" has been proposed with the development of mobile communications system such as cellular phone, radio LAN and Bluetooth: Signals from many sensor nodes spread in a wide area are gathered to a center node by a technology similar to that used in mobile communications. Sensor Network enables home/office circumstance control, environment monitoring and protection based on the collected data. We propose a new SAW (Surface Acoustic Wave) subtle-gas sensor that can be used in these sensor nodes. The new sensor structure has no limited selection for which piezoelectric crystal substrates to be used, while only Quartz crystal substrates have been used in conventional SAW gas sensors. We also extended sensing dynamic range by utilizing both fundamental and 3rd-harmonic frequency. We designed new types of interdigital transducer (IDT) to fabricate prototype samples using SMBC process facilities. Experimental results showed the possibility of exciting on both fundamental and 3rd-harmonic SAWs. Our sensors are also designed so it can be combined with 2.4-GHz ZigBee, which has been regulated by IEEE802.15.4 and ZigBee Alliance as a wireless-communications medium for the "Sensor Network". It is predicted that our network system will provide sensing systems for hydrogen-gas leakage of fuel-cell cars and environmental-pollution gas sensing in future.
工学院大学の論文