3A2 Online Rescheduling in Semiconductor Manufacturing(Technical session 3A: Scheduling under uncertainty 1)

概要

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Semiconductor manufacturing is mainly characterized by diversity of products, different process types, and random failures. It is extremely difficult to solve manufacturing rescheduling problems in real time due to high frequency of disturbance occurrence (about 1time/1 minute). This paper proposes a new approach for online manufacturing rescheduling. Different from traditional methods to have a scheduling process again, we revise the existing schedule to keep high schedule stability based on message passing ; and during the execution of manufacturing, we improve its performance of the revised schedule on due date with an introduction of a quick local search by permutations of processes on semi-critical paths. Through the actual problems with about 200,000 processes, this method can effectively accommodate disturbances in less than 1 second, and obtain a better executable schedule in less than 1 minute. It is also evaluated to be more effective (higher schedule stability and less violation of due date) by a comparison with conventional dispatching-rule based methods, some of which have been actually applied in many facilities.
一般社団法人日本機械学会の論文
2006-07-18