Atomic Force Microscopy and Kelvin Probe Force Microscopy Measurements of Semiconductor Surface Using Carbon Nanotube Tip Fabricated by Electrophoresis
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概要
- 論文の詳細を見る
Carbon nanotube (CNT) tips were fabricated by attaching the CNTs directly to conventional Si cantilever tips by electrophoresis. Clear topographic and potential profiles have been obtained using the CNT tips in atomic force microscopy (AFM) and Kelvin probe force microscopy (KFM) measurements. It is important to place the CNT tip close to the sample to improve the spatial resolution in the KFM measurements. [DOI: 10.1143/JJAP.41.2615]
- 社団法人応用物理学会の論文
- 2002-04-30
著者
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SHIMADA Takashi
Department of Applied Physics, The University of Tokyo
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水谷 照吉
愛知工業大学電気工学科
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SHINOHARA Hisanori
Department of Cardiology and Clinical Research, National Hospital Organization Zentsuji Hospital
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Shimada T
Department Of Applied Physics The University Of Tokyo
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KISHIMOTO Shigeru
Graduate School of Engineering, Nagoya University
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MIZUTANI Takashi
Department of Quantum Engineering, Nagoya University
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Mizutani T
Nagoya Univ. Nagoya‐shi Jpn
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Mizutani Takashi
Department Of Health Sciences Yamanashi Medical University
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KISHIMOTO Shigeru
Department of Quantum Engineering, Nagoya University
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SUGAI Toshiki
Department of Chemistry, Nagoya University
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Kishimoto Shigeru
Department Of Quantum Engineering Nagoya University
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Kishimoto Shigeru
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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Shinohara Hisanori
Department Of Chemistry Graduate School Of Science Nagoya University
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Shinohara Hisanori
Department Of Cardiology And Clinical Research National Hospital Organization Zentsuji Hospital
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MAEDA Chikashi
Department of Quantum Engineering, Graduate School of Engineering, Nagoya University
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Maeda Chikashi
Department Of Quantum Engineering Graduate School Of Engineering Nagoya University
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OZEKI Norihito
Department of Quantum Engineering, Graduate School of Engineering, Nagoya University
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Sugai Toshiki
Department Of Chemistry And Institute For Advanced Research Nagoya University
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Ozeki Norihito
Department Of Quantum Engineering Graduate School Of Engineering Nagoya University
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Mizutani Takashi
Department Of Electronics Faculty Of Engineering Nagoya University
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Mizutani Takashi
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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Shinohara Hisanori
Department Of Cardiology And Clinical Research
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