Large Area InP Submicron TWO-Dimensional (2D) Periodic Structures Fabricated by TWO-Time Laser Holography
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概要
- 論文の詳細を見る
We fabricated submicron two-dimensional (2D) periodic structures on (100)-InP substrates by two-time He-Cd laser holography, and subsequent dry and wet etchings. Triangular and square lattice patterns with periods of 300 nm-500 nm were successfully fabricated over large areas of the substrates. We measured the reflectance of the samples to observe reflectance reduction phenomena inherent to the submicron 2D periodic structures.
- 社団法人応用物理学会の論文
- 2002-02-28
著者
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Utaka Katsuyuki
School Of Fundamental Science And Engineering Waseda University
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Nagai Kenji
School Of Science And Engineering Waseda University
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Nakao Masashi
Ntt Photonics Laboratories:(present Office)tohoku University
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Nakao Masashi
Ntt Photonics Laboratories
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OHIRA Tomoaki
School of Science and Engineering, Waseda University
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SEGAWA Tetsuro
School of Science and Engineering, Waseda University
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Nakao Masashi
Ntt Photonics Labs.
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Ohira Tomoaki
School Of Science And Engineering Waseda University
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Segawa Tetsuro
School Of Science And Engineering Waseda University
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UTAKA Katsuyuki
School of Science and Engineering, Waseda University
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