招待講演 A 65nm embedded SRAM with wafer level burn-in mode, leak-bit redundancy and E-trim fuse for known good die (集積回路)
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概要
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We propose a wafer level burn-in (WLBI) mode, a leak-bit redundancy and a small, highly reliable Cu E-trim fuse repair scheme for an embedded 6T-SRAM to achieve a KGD-SoC. We febricated a 16M-SRAM with these techniques using 65 nm LSTP technology, and confirmed its efficient operation. The WLBI mode has almost no area penalyy and a speed penalty of only 50 ps. The leak-bit redundancy area penalty is less than 2%.
- 2007-04-05
著者
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Nii Koji
Renesas Electronics Corporation
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Nii Koji
Renesas Technology Corporation
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Nii K
Renesas Technol. Corp. Itami‐shi Jpn
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Makino Hiroshi
Renesas Technology Corporation
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SHINOHARA Hirofumi
Renesas Technology Corporation
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Makino H
Mitsubishi Electric Corp. Itami‐shi Jpn
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Arakawa Masashi
Renesas Technology Corporation
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Uchida Takahiro
Renesas Technology Corporation
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Imaoka Susumu
Renesas Design Corporation
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Ohbayashi Shigeki
Renesas Technology Corporation
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Yabuuchi Makoto
Renesas Technology Corporation
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Kono Kazushi
Renesas Technology Corporation
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Oda Yuji
Shikino High-Tech Corporation
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Usui Keiichi
Daioh Electric Co. Ltd.
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Yonezu Toshiaki
Renesas Technology Corporation
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Iwamoto Takeshi
Renesas Technology Corporation
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Tsukamoto Yasumasa
Renesas Technology Corporation
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Ishibashi Koichiro
Renesas Technology Corporation
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Ishibashi Koichiro
Renesas Technology
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