WC-Co超硬合金の集束イオンビーム微細加工における面粗さに及ぼす組織と加工条件の影響(<特集>マイクロマテリアル)

概要

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The WC-Co cemented carbides with the WC grain sizes of 0.4-4.5^m and the Co contents of 10-15% were machined by focused 30keV Ga^+ ion beam (FIB) at doses of 5.0×10^<16>〜2.5×10^<18>ions/cm^2 and their surface roughness was investigated by atomic force microscope (AFM), where FIB machining was carried out by scanning the nominal spot sizes of 100 and 300nm, the beam overlap of 37.5, 50 and 67% and the pixel dwell time of 100 and 227μs. Experimental results on effects of micro structure on the surface roughness showed that the decrease in WC grain size and averaged phase width of Co is required to reduce the surface irregularities for the FIB micro-machining of WC-Co cemented carbides. Moreover, it was revealed from the viewpoint of effects of machining conditions on the surface morphology that small surface irregularities is obtained by FIB machining with larger beam diameter, larger overlap and shorter dwell time.
社団法人日本材料学会の論文
2005-10-15