真空環境対応位置決めテーブル用差動排気シールに関する基礎研究(機械要素,潤滑,工作,生産管理など)

概要

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With high integration of a semiconductor, the development of an aerostatic bearing used for ultra-precision positioning table system in vacuum environment is needed. In order to make it possible to an aerostatic bearing in vacuum environment, a differential pumping seal, which is one of the seal method, is needed. In this study, the differential pumping seal of linear motion type was developed, and then its performances in a stop and a movement states were evaluated. As a result, we clarified that it achieves the vacuum degree of 10^<-5> Pa order and quantified influence of a pressure change over travel length and moving speed in a movement state. Furthermore, we identified the main factor of this pressure change and confirmed the effectiveness of dehumidifying surrounding air space to restrain this pressure change.
一般社団法人日本機械学会の論文
2005-10-25