4025 液晶パネル製造装置開発への有限要素法解析の適用(G10-5 柔軟系のダイナミクス,G10 機械力学・計測制御)

概要

論文の詳細を見る
In this paper we describe how to use the finite element method (FEM) in development of flat panel display (FPD) product equipment. Nowadays the size of mother-glass used in production of FPD is growing rapidly. So FPD product equipments are being required not only the rising of basic performance but also the enlargement of equipment and reduction of the process time. To satisfy these requirements, we used the FEM to develop the resist coater, which is one of key FPD product equipment. At first we tried to construct the models of mechanical parts like ball-screw and non-linear vibration region. In these processes, we used spring-damper elements. And we could confirm that these models are effective. And then we constructed the full size model of resist coater with mechanical parts models consist of spring-damper elements and other models confirmed by modal analysis. With that model, we could predict, improve and produce the high performance next-generation resist coater.
一般社団法人日本機械学会の論文
2005-09-18