A Study on Surface Integrity of SiC/Si Hybrid Nano-Structured Surfaces(Surface and edge finishing)

スポンサーリンク

概要

• 論文の詳細を見る

• In the present study, flat Si and SiC bulk, and thin layered SiC on Si were prepared and they were processed with micro grooves by UV laser ablation of 355nm wave length. Their surface Hardness and Young's Modulus were tested by Nano-indentation and compensated to obtain real value of their surface integrities. Since both of the Hardness and Young's modulus of SiC thin layer rises once a depth of indentation exceeds the limit of about 1/5 of layer thickness, they can be designed by changing the thickness of SiC layer and can be applicable to attain tough surface for MEMS.

• 2005-10-18

著者

• Kakuta Akira

  Tokyo Metropolitan University

• FURUKAWA Yuji

  Tokyo University of Agriculture&Technology

• CHUMA Kenichiro

  Tokyo University of Agriculture & Technology (TUAT)

• HAN Yujie

  Tokyo University of Agriculture & Technology (TUAT)

• Han Yujie

  Tokyo University Of Agriculture & Technology (tuat)

• Chuma Kenichiro

  Tokyo University Of Agriculture & Technology (tuat)

• Furukawa Yuji

  Tokyo University Of Agriculture & Technology (tuat)

• Furukawa Yuji

  Tokyo University Of Agriculture & Technology

関連論文

• A Study on Surface Integrity of SiC/Si Hybrid Nano-Structured Surfaces(Surface and edge finishing)
• Development of a New Traveling Wave Ultrasonic Micro Motor : Application to Catheter in Micro Blood Vessels(Nano/micro measurement and intelligent instrument)
• Development of Direct Photosynthetic/Metabolic Bio-Fuel Cell(Nano/micro measurement and intelligent instrument)
• The Second International Conference on Advanced Manufacturing Technology Leading Edge Manufacturing in the 21^ Century (LEM21)

スポンサーリンク